LotTrack™ enables active control of manually operated logistics flows
in semiconductor fabs. With this, the solution supports the goal of a paperless- and zero-defect fab. LotTrack is based on three core functionalities:
|  | Localization: The solution works like an "indoor GPS", providing real-time localization of each wafer-carrier in the fab with an accuracy of < 0.5 meters.
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|  | Assistance: The DisTag is the solution's smart man-machine interface. It is directly attached to each wafer-carrier. The large no-power display provides all process relevant information to the operator, actively supporting his workflow.
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|  | Compliance: The LotTrack Compliance functionality ensures the integrity between cassette, wafer-carrier and tool at all times, eliminating process errors before they can occur. |
LotTrack has been implemented and is being operated by Intellion in three major European and Asian fabs of Infineon Technologies AG and in one European fab of ST Microelectronics. Since more than 5 years, LotTrack has proven highest reliability in a 24/7 environment. The solution has received
several awards and is unmatched in the semiconductor industry. Since 2009, LotTrack is part of Applied Material’s SmartMove System. SmartMove integrates Applied’s production-proven Activity Manager™ workflow software with Intellion’s LotTrack technology. For more information on the SmartMove System, visit
Applied Material's site.