The LotTrack™ system architecture is based on three core components: the LotTrack Control Suite, the Antenna Line and the DisTag. The solution is implemented in compliance with the already existing customer infrastructure and required system functions. LotTrack's standard architectures are illustrated below. LotTrack enables real-time localization of all wafer-carriers all over the fab with an accuracy of < 0.5 m. The efficient operator assistance is achieved through the large no-power display of the DisTag. As a result of the seamless integration into the fab’s MES, LotTrack delivers all relevant assistance information to every lot in real-time. LotTrack's Box Compliance functionality ensures the integrity of each lot, providing instant and unique identification of every cassette in a wafer-carrier. Handling errors are instantly visible to the operator. The Integrity Tag, as the enabler for Box Compliance, can easily be attached to virtually any cassette type. LotTrack enables secure and reliable load port identification, using its integrated Tool Compliance functionality. This core feature avoids misplacements of lots into the wrong tool. LotTrack Tool Compliance can easily be integrated in the fab's environment, independently of tool and / or robot type.