Increased operator efficiency is achieved by avoiding lot searching activities due to exact lot positions in the fab at any time. Furthermore, all relevant and correct information (such as next destination, lot priority) is available at the point of action, reducing operator efforts to gather information from different IT-systems.

The platform provides full shop floor visibility for logistic optimization, leading to shorter cycle times and lower WIP. Dispatch lists can now easily be followed by operators, because every lot can be found immediately. As a result, compliance to dispatch priorities is achieved.

The platform provides full shop floor visibility for logistic optimization, leading to shorter cycle times and lower WIP. Dispatch lists can now easily be followed by operators, because every lot can be found immediately. As a result, compliance to dispatch priorities is achieved.

Through LotTrack's Compliance functionality, the integrity between cassette, wafer-carrier and tool is ensured. The system detects mix-ups and other handling errors at their origin and immediately alarms the operator. Thus, the solution contributes substantially to the goal of a zero defect fab.