The LotTrack LoadPort Reader enables Load & Go workflows for open-cassette fabs. The load ports of all tools in the fab are equipped with LoadPort Readers. LotTrack ID Cards with a 1D/2D barcode are attached to all wafer carriers. Alternatively, existing barcodes on the carriers can be used. When a carrier is placed on a load port, real-time authentication is performed through a barcode scan by the LoadPort Reader. This enables automatic tool starts.

This website uses cookies to improve the functions and content offered to you. By continuing to use our site, you consent to this. You will find further information on our privacy policy in the following link. Learn More

The cookie settings on this website are set to "allow cookies" to give you the best browsing experience possible. If you continue to use this website without changing your cookie settings or you click "Accept" below then you are consenting to this.