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Operator Assistance and Global Localization (8″ Fab)

200 mm fab: LotTrack DisTag COM are attached to all 8″ wafer boxes and the LotTrack DisTag LOC is attached to reticle boxes. The Operator receives context-based assistance information, using the DisTag’s large display on wafer boxes. All wafer boxes and reticles can be located anywhere in the fab with an accuracy of <0.5m in real-time.

Wireless communication and localization of DisTag COMs and DisTag LOCs takes place via the LotTrack Antenna Lines. The LotTrack Control Suite processes all data and information and integrates the LotTrack system into the customer’s IT systems, such as MES and Dispatcher.

The displayed LotTrack solution uses the following LotTrack components.

LotTrack Komponenten

LotTrack DisTag COM

The DisTag is the central component of the LotTrack system and the basis for functions such as operator assistance, automated tool starts as well as global and place-based localization. As an intelligent man-machine interface, it is attached to all wafer boxes or SMIF pods and integrates several innovative technologies. Its high-contrast, low-power display and pick-by-light functionality enable operator assistance. Ultrasound, wireless technologies, motion sensors and optical sensors enable tool automation for load & go workflows and batch localization up to 0.5 m as well as place detection. The DisTag COM is battery powered and wirelessly communicates with the LotTrack Antenna Infrastructure.

  • Tool Automation

  • Operator Assistance

  • Lot Localization

  • Wireless Communication

LotTrack DisTag on an 8“ Wafer Box

Special holder systems enables an optimal position of the DisTag on the 8" wafer box. This allows an optimal operator assistance (inclination of the display and the LED). In addition, a small overhang of the DisTag on the wafer box avoids collisions during storage processes in stocker systems.

  • Easy Retrofit

LotTrack DisTag LOC

The DisTag LOC enables the localization of reticles and supports search functions with an integrated LED. Due to its compact design, the DisTag LOC can be easily mounted on the reticle.

  • Lot Localization

  • Operator Assistance

  • Wireless Communication

LotTrack Antenna Line

The LotTrack Antenna Line interacts wirelessly with the LotTrack devices on the shop floor, such as the DisTag, LoadPort Identifier or LoadPort Reader. Its main functions are RFID communication with all wireless devices and global localization of wafer boxes and pods with an accuracy of up to 0.5 m. A LotTrack Antenna Line consists of individual antenna modules that can be easily and quickly attached to the cleanroom ceiling. Using Intellion's proven ceiling mounting system, the implementation time in the running fab is reduced to a minimum (easy retrofit).

  • Wireless Communication

  • Lot Localization

  • Easy installation (retrofit)

LotTrack Control Suite

As the backbone of the LotTrack solution, the LotTrack Control Suite links all manufacturing processes with MES, automation, dispatching or other IT clients. Software modules can be integrated into the LotTrack Control Suite via a comprehensive API. This allows to meet specific automation and IT needs of each fab.

Dr. Stephan Eisen | Managing Partner

I am looking forward to your call.

stephan.eisen@intellion.com

+41-71-280 81 81

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