Operator Assistance and Zone Localization (6″ Fab)

150mm fab: DisTag COMs are attached to 6” and 4” wafer boxes. The Operator receives context-based assistance information, using the DisTag’s large display on wafer boxes. LotTrack Zone Localizers determine the positions of wafer boxes within shelves and areas.

Wireless communication to DisTags and Zone Localizers is handled by LotTrack Antenna Modules COM. The LotTrack Control Suite processes all data and information and integrates the LotTrack system into the customer’s IT systems, such as MES and Dispatcher.

The following LotTrack components are used for this LotTrack architecture:

LotTrack Components

LotTrack DisTag COM

The DisTag is the central component of the LotTrack system and the basis for functions such as operator assistance, automated tool starts as well as global and place-based localization. As an intelligent man-machine interface, it is attached to all wafer boxes or SMIF pods and integrates several innovative technologies. Its high-contrast, low-power display and pick-by-light functionality enable operator assistance. Ultrasound, wireless technologies, motion sensors and optical sensors enable tool automation for load & go workflows and batch localization up to 0.5 m as well as place detection. The DisTag COM is battery powered and wirelessly communicates with the LotTrack Antenna Infrastructure.
  • Tool Automation

  • Operator Assistance

  • Lot Localization

  • Wireless Communication

LotTrack DisTag on a 6“ Wafer Box

For ideal assistance, the LotTrack DisTag (large display, LED) must be attached to the 6" wafer box at the optimum viewing angle to the operator. This is achieved by customer-specific mounting systems, e.g. snap-in mounts for easy mounting and removal of the DisTag from the wafer box.
  • Easy Retrofit

LotTrack DisTag on a 4“ Waferbox

Due to the compact design of the DisTag COM, it can also be attached to a 4" wafer box. In addition to the localization of a lot, the DisTag also enables operator assistance via the large display and the LED.
  • Easy Retrofit

LotTrack Antenna Module COM

The LotTrack Antenna Module COM communicates wirelessly via RFID with LotTrack devices (e.g. DisTag, LoadPort Identifier, LoadPort Reader and Zone Localizer). The Antenna Module COM is mounted to the cleanroom ceiling, using Intellion's proven and simple ceiling mounting system (easy retrofit).
  • Wireless Communication

  • Easy Retrofit

LotTrack Zone Localizer

The LotTrack Zone Localizer enables the localization of wafer boxes and SMIF pods within predefined zones, such as in racks or on tables. The Zone Localizer is easily and quickly attached to the cleanroom ceiling, using Intellion's proven ceiling mounting system.
  • Zone Localization

  • Wireless Communication

LotTrack Control Suite

As the backbone of the LotTrack solution, the LotTrack Control Suite links all manufacturing processes with MES, automation, dispatching or other IT clients. Software modules can be integrated into the LotTrack Control Suite via a comprehensive API. This allows to meet specific automation and IT needs of each fab.

Dr. Stephan Eisen | Managing Partner

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+41-71-280 81 81

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