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Tool Automation, Assistance and Global Localization (SMIF Fab)

200 mm SMIF fab: LotTrack DisTag COMs are attached to all SMIF pods. LotTrack LoadPort Identifiers are installed on all load ports of tools.

The Operator receives context-based assistance information, using the DisTag’s large display on the SMIF pods. As soon as a SMIF pod is placed on a Load Port, the DisTag COM detects the LoadPort Identifier. The following authentication process enables the automatic tool start and supports the “Load&Go” workflow. All SMIF pods can be located anywhere in the factory with an accuracy of < 0.5m at any time.

Wireless communication and localization of the DisTags is done via the LotTrack Antenna Lines. The LotTrack Control Suite processes all data and information and integrates the LotTrack system into the customer’s IT systems, such as MES and Dispatcher.

 

The displayed LotTrack architecture uses the following LotTrack components:

LotTrack Components

LotTrack DisTag COM

The DisTag is the central component of the LotTrack system and the basis for functions such as operator assistance, automated tool starts as well as global and place-based localization. As an intelligent man-machine interface, it is attached to all wafer boxes or SMIF pods and integrates several innovative technologies. Its high-contrast, low-power display and pick-by-light functionality enable operator assistance. Ultrasound, wireless technologies, motion sensors and optical sensors enable tool automation for load & go workflows and batch localization up to 0.5 m as well as place detection. The DisTag COM is battery powered and wirelessly communicates with the LotTrack Antenna Infrastructure.

  • Tool Automation

  • Operator Assistance

  • Lot Localization

  • Wireless Communication

LotTrack DisTag on a SMIF Pod

The DisTag can be used with the existing holder systems for Asyst Tags or TelTags on SMIF Pods, using a special adapter on the back (easy retrofit). The adapter is designed in close cooperation with the customer, in order to ensure an optimum for operator assistance (inclination of the display) and to avoid collisions when the Pod used in stocker systems. The simple snap-in mechanism for mounting and removing the DisTag makes it easy to use.

  • Easy retrofit

LotTrack LoadPort Identifier for SMIF Fabs

In SMIF fabs, the LotTrack LoadPort Identifier is attached to all load ports of a tool. The DisTags are attached to SMIF Pods. When a SMIF Pod is placed on a load port, real-time authentication of the tool is performed by the DisTag, using the LoadPort Identifier. This enables a Load&Go workflow. Any type of tool can be integrated, including legacy tool types.

  • Real-time Authentification

  • Load & Go Workflow

  • Easy retrofit

LotTrack Antenna Line

The LotTrack Antenna Line interacts wirelessly with the LotTrack devices on the shop floor, such as the DisTag, LoadPort Identifier or LoadPort Reader. Its main functions are RFID communication with all wireless devices and global localization of wafer boxes and pods with an accuracy of up to 0.5 m. A LotTrack Antenna Line consists of individual antenna modules that can be easily and quickly attached to the cleanroom ceiling. Using Intellion's proven ceiling mounting system, the implementation time in the running fab is reduced to a minimum (easy retrofit).

  • Wireless Communication

  • Lot Localization

  • Easy installation (retrofit)

LotTrack Control Suite

As the backbone of the LotTrack solution, the LotTrack Control Suite links all manufacturing processes with MES, automation, dispatching or other IT clients. Software modules can be integrated into the LotTrack Control Suite via a comprehensive API. This allows to meet specific automation and IT needs of each fab.

Dr. Stephan Eisen | Managing Partner

I am looking forward to your call

stephan.eisen@intellion.com

+41-71-280 81 81

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