200 mm SMIF fab: LotTrack DisTag COMs are attached to all SMIF pods. LotTrack LoadPort Identifiers are installed on all load ports of tools.
The Operator receives context-based assistance information, using the DisTag’s large display on the SMIF pods. As soon as a SMIF pod is placed on a Load Port, the DisTag COM detects the LoadPort Identifier. The following authentication process enables the automatic tool start and supports the “Load&Go” workflow. All SMIF pods can be located anywhere in the factory with an accuracy of < 0.5m at any time.
Wireless communication and localization of the DisTags is done via the LotTrack Antenna Lines. The LotTrack Control Suite processes all data and information and integrates the LotTrack system into the customer’s IT systems, such as MES and Dispatcher.
The displayed LotTrack architecture uses the following LotTrack components:
Load & Go Workflow
Easy installation (retrofit)
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