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Tool Automation, Assistance and Place-Based Localization (SMIF Fab)

200 mm SMIF fab: LotTrack DisTag COMs are attached to all SMIF pods. LotTrack Position Identifiers with barcodes are attached to all positions, where SMIF pods have to be detected (e.g. on load ports, shelves and trolleys).

The Operator receives context-based assistance information, using the DisTag’s large display on SMIF pod. As soon as a SMIF pod is placed on a load port at a tool or on a shelf, the DisTag detects the position identifier and enables position-based localization or automatic tool start. The automatic tool start enables the “Load&Go” workflow.

Wireless communication to the DisTags takes place via the LotTrack Antenna Module COM infrastructure. The LotTrack Control Suite processes all data and information and integrates the LotTrack system into the customer’s IT systems, such as MES and Dispatcher.

The following components are used for this architecture:

LotTrack Components

LotTrack DisTag COM

The DisTag is the central component of the LotTrack system and the basis for functions such as operator assistance, automated tool starts as well as global and place-based localization. As an intelligent man-machine interface, it is attached to all wafer boxes or SMIF pods and integrates several innovative technologies. Its high-contrast, low-power display and pick-by-light functionality enable operator assistance. Ultrasound, wireless technologies, motion sensors and optical sensors enable tool automation for load & go workflows and batch localization up to 0.5 m as well as place detection. The DisTag COM is battery powered and wirelessly communicates with the LotTrack Antenna Infrastructure.

  • Tool Automation

  • Operator Assistance

  • Lot Localization

  • Wireless Communication

LotTrack DisTag on a SMIF Pod

The DisTag can be used with the existing holder systems for Asyst Tags or TelTags on SMIF Pods, using a special adapter on the back (easy retrofit). The adapter is designed in close cooperation with the customer, in order to ensure an optimum for operator assistance (inclination of the display) and to avoid collisions when the Pod used in stocker systems. The simple snap-in mechanism for mounting and removing the DisTag makes it easy to use.

  • Easy retrofit

LotTrack Position Identifier for SMIF Fabs

LotTrack Position Identifiers with a 1D/2D barcode are attached to smart positions such as SMIF load ports, shelves, workstations or trolleys. When a SMIF Pod with the DisTag is placed on a Smart Position, the DisTag recognizes the Position Identifier's barcode through its built-in camera module. This enables precise area or position recognition on shelves, on trolleys or at the load port, allowing automatic tool starts.

  • Place Localization

  • Tool Authentification

LotTrack Antenna Module COM

The LotTrack Antenna Module COM communicates wirelessly via RFID with LotTrack devices (e.g. DisTag, LoadPort Identifier, LoadPort Reader and Zone Localizer). The Antenna Module COM is mounted to the cleanroom ceiling, using Intellion's proven and simple ceiling mounting system (easy retrofit).

  • Wireless Communication

  • Easy Retrofit

LotTrack Control Suite

As the backbone of the LotTrack solution, the LotTrack Control Suite links all manufacturing processes with MES, automation, dispatching or other IT clients. Software modules can be integrated into the LotTrack Control Suite via a comprehensive API. This allows to meet specific automation and IT needs of each fab.

Dr. Stephan Eisen | Managing Partner

I am looking forward to your call.

stephan.eisen@intellion.com

+41-71-280 81 81

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