200 mm fab: The LotTrack DisTags are attached to all 8″ wafer boxes. LotTrack LoadPort Reader and LotTrack ToolDisplays are implemented on all load ports of the tools. In addition, LotTrack SmartPlacer are installed on the flexible transport robots, enabling hybrid automation at the human-robot interface.
The Operator receives context-based assistance information, using the DisTag’s large display on wafer boxes, or the ToolDisplay at a tool. If a wafer carrier is placed on a load port of a tool, the LoadPort Reader detects the wafer carrier by reading its 1D/2D barcode. This enables an automatic tool start (“Load&Go” workflow). When a wafer box is placed on a SmartPlacer, the transport robot recognizes the wafer carrier in the wafer box. All wafer boxes are located anywhere in the fab with an accuracy of up to 0.5m in real-time.
Wireless communication with all LotTrack devices such as the DisTag, LoadPort Reader and SmartPlacer, as well as the DisTag localization, takes place via the LotTrack Antenna Lines. The LotTrack Control Suite processes all data and information and integrates the LotTrack system into the customer’s IT systems, such as MES and Dispatching Client.
The displayed LotTrack solution uses the following LotTrack components:
Automatic Tool Start
Load & Go Workflow
Simple retrofitting of existing tools
Easy installation (retrofit)
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