Sub Category: At the Tool

LotTrack ToolDisplay

The large LotTrack ToolDisplay is installed at tools. It provides operators with detailed information on each load port of the tool. The information for the ToolDisplay is provided by the customer’s IT automation systems. The ToolDisplay is controlled wirelessly via the LotTrack Antenna Infrastructure and can be easily retrofitted.

LotTrack LoadPort Reader

The LotTrack LoadPort Reader enables Load & Go workflows for open-cassette fabs. The load ports of all tools in the fab are equipped with LoadPort Readers. LotTrack ID Cards with a 1D/2D barcode are attached to all wafer carriers. Alternatively, existing barcodes on the carriers can be used. When a carrier is placed on a… Read more »

LotTrack Position Identifier for SMIF Fabs

LotTrack Position Identifiers with a 1D/2D barcode are attached to smart positions such as SMIF load ports, shelves, workstations or trolleys. When a SMIF Pod with the DisTag is placed on a Smart Position, the DisTag recognizes the Position Identifier’s barcode through its built-in camera module. This enables precise area or position recognition on shelves,… Read more »

LotTrack LoadPort Identifier for SMIF Fabs

In SMIF fabs, the LotTrack LoadPort Identifier is attached to all load ports of a tool. The DisTags are attached to SMIF Pods. When a SMIF Pod is placed on a load port, real-time authentication of the tool is performed by the DisTag, using the LoadPort Identifier. This enables a Load&Go workflow. Any type of… Read more »