Features

LotTrack is based on four core features that can be combined modularly:

• Automated Tool Starts: LotTrack enables automatic tool starts ("Load & Go workflow") by identifying wafer carriers or SMIF pods in real time, once an operator places them on a load port. Wafer carriers or SMIF pods can be identified via RFID, infrared or 1D/2D barcodes.
• Hybrid Automation: For a "hybrid automation" between humans and robots, LotTrack provides various interfaces that enable seamless collaboration.
• Operator Assistance: The DisTag is the interface between the operator and the LotTrack solution. It is attached directly to wafer boxes or SMIF pods. The large low-power display of the DisTag provides all process-relevant information to the operator, supporting him in his daily work. The integrated LED supports pick-by-light search processes.
• Lot Localization: LotTrack offers different accuracy levels to localize wafer boxes and SMIF pods. The highest resolution level (global localization) offers an accuracy of < 0.5 m throughout the entire fab. Other options allow for area-based localization on shelves, transport trolleys or load ports. Zone-based localizations, e.g. for doorways, are also supported by gates.

System Architecture

LotTrack's modular architecture includes four levels:

• LotTrack DisTag: mobile device attached to wafer boxes or SMIF pods
• LotTrack tool infrastructure: devices for automatic identification of wafer carriers or SMIF pods placed on load ports
• LotTrack antenna infrastructure: the communication and localization infrastructure that integrates DisTags and the LotTrack tool infrastructure.
• LotTrack Control Suite: software with API to the IT of the customer

In tight interaction with our customers, we configure the various LotTrack components to a tailor-made solution. This leads to an optimal fit of the customer's requirements while, at the same time, achieving the highest possible benefits. The following examples show different examples of customer-specific LotTrack system architectures.