The DisTag can also be used on 300mm FOUPs, using to a special adapter system on the back (easy retrofit).

The DisTag can be used with the existing holder systems for Asyst Tags or TelTags on SMIF Pods, using a special adapter on the back (easy retrofit). The adapter is designed in close cooperation with the customer, in order to ensure an optimum for operator assistance (inclination of the display) and to avoid collisions when the Pod used in stocker systems. The simple snap-in mechanism for mounting and removing the DisTag makes it easy to use.

Special holder systems enables an optimal position of the DisTag on the 8" wafer box. This allows an optimal operator assistance (inclination of the display and the LED). In addition, a small overhang of the DisTag on the wafer box avoids collisions during storage processes in stocker systems.

For ideal assistance, the LotTrack DisTag (large display, LED) must be attached to the 6" wafer box at the optimum viewing angle to the operator. This is achieved by customer-specific mounting systems, e.g. snap-in mounts for easy mounting and removal of the DisTag from the wafer box.

Due to the compact design of the DisTag COM, it can also be attached to a 4" wafer box. In addition to the localization of a lot, the DisTag also enables operator assistance via the large display and the LED.

The DisTag LOC enables the localization of reticles and supports search functions with an integrated LED. Due to its compact design, the DisTag LOC can be easily mounted on the reticle.

The DisTag is the central component of the LotTrack system and the basis for functions such as operator assistance, automated tool starts as well as global and place-based localization. As an intelligent man-machine interface, it is attached to all wafer boxes or SMIF pods and integrates several innovative technologies. Its high-contrast, low-power display and pick-by-light functionality enable operator assistance. Ultrasound, wireless technologies, motion sensors and optical sensors enable tool automation for load & go workflows and batch localization up to 0.5 m as well as place detection. The DisTag COM is battery powered and wirelessly communicates with the LotTrack Antenna Infrastructure.

The LotTrack ID Card is a smartcard equipped with RF and 1D barcode. It is used on wafer carriers, wafer boxes and transport robots for unique and secure identification.

When a wafer box is placed on a LotTrack SmartPlacer, the device checks the integrity of the lot by comparing LotTrack ID Cards: Is the right wafer carrier in the right wafer box? In addition, the SmartPlacer is used for hybrid automation, where the lots placed on a transport robot can be identified. All actions are published wirelessly to the LotTrack system.

The large LotTrack ToolDisplay is installed at tools. It provides operators with detailed information on each load port of the tool. The information for the ToolDisplay is provided by the customer's IT automation systems. The ToolDisplay is controlled wirelessly via the LotTrack Antenna Infrastructure and can be easily retrofitted.

The LotTrack LoadPort Reader enables Load & Go workflows for open-cassette fabs. The load ports of all tools in the fab are equipped with LoadPort Readers. LotTrack ID Cards with a 1D/2D barcode are attached to all wafer carriers. Alternatively, existing barcodes on the carriers can be used. When a carrier is placed on a load port, real-time authentication is performed through a barcode scan by the LoadPort Reader. This enables automatic tool starts.

LotTrack Position Identifiers with a 1D/2D barcode are attached to smart positions such as SMIF load ports, shelves, workstations or trolleys. When a SMIF Pod with the DisTag is placed on a Smart Position, the DisTag recognizes the Position Identifier's barcode through its built-in camera module. This enables precise area or position recognition on shelves, on trolleys or at the load port, allowing automatic tool starts.

In SMIF fabs, the LotTrack LoadPort Identifier is attached to all load ports of a tool. The DisTags are attached to SMIF Pods. When a SMIF Pod is placed on a load port, real-time authentication of the tool is performed by the DisTag, using the LoadPort Identifier. This enables a Load&Go workflow. Any type of tool can be integrated, including legacy tool types.